Numerical analysis of microresonator developed on the basis of PZT nanocomposite

  • Giedrius Janusas Kaunas University of Technology
  • Elingas Čekas Kaunas University of Technology
  • Kęstutis Pilkauskas Kaunas University of Technology
  • Farusil Najeeb Mullaveettil Kaunas University of Technology
Keywords: Microresonator, piezoelectric material, periodical microstructure, diffraction efficiency

Abstract

Microresonators are fundamental components integrated in hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micromirror devices, material characterization, gyroscopes, etc. Microresonator is a device where a piezoelectric coating plays most important role in the design and operation of the element itself. Also piezoelectric layer allows to create a novel microresonator with controllable parameters, which could assure much higher functionality of microelectromechanical systems. Forming periodical microstructure in the nanocomposite material allows to involve two measurement types for better accuracy: electrical and optical. Finite element model in Comsol Multiphysics environment was created. Numerical analysis of microresonator developed on the basis of PZT nanocomposite is presented. Electrical potential of 2.2 V for the corresponding 10 V input was recorded. Dependency of diffraction efficiency and diffraction angle to period changes were investigated.

DOI: http://dx.doi.org/10.5755/j01.mech.23.5.16308

Author Biographies

Giedrius Janusas, Kaunas University of Technology
Department of Mechanical Engineering
Elingas Čekas, Kaunas University of Technology
Department of Mechanical Engineering
Kęstutis Pilkauskas, Kaunas University of Technology
Department of Mechanical Engineering
Farusil Najeeb Mullaveettil, Kaunas University of Technology
Department of Mechanical Engineering
Published
2017-10-25
Section
MECHANICAL TECHNOLOGIES