Microstructure replication using high frequency vibroactive pad

  • Rokas Šakalys Department of Mechanical Engineering Faculty of Mechanical Engineering and Design Kaunas University of Technology
  • G. Janušas Kauno Technologijos universitetas
  • A. Palevičius Kauno Technologijos universitetas
  • R. Bendikienė Kauno Technologijos universitetas
  • R. Palevičius Kauno Technologijos universitetas

Abstract

The paper is dedicated to analysis and practical exploitation of new generation vibroactive pad, whose fundament is stack type actuator. Experiment is performed in order to find first resonant mode of vibroactive pad, and later on pad is applied in mechanical hot imprint process, pursuing to enhance the quality of created microstructure. Three types of microstructure quality measurements are performed: measurement of diffraction efficiency, optical microscopy and atomic force microscopy, in order to analyze the quality of replica. Microstructures are created on the surface of polycarbonate, using the same process parameters, the only variable is high frequency excitation or its absence.

DOI: http://dx.doi.org/10.5755/j01.mech.21.2.8886

Published
2015-04-13
Section
DYNAMICS OF MECHANICAL SYSTEMS