Investigation of micromechanical gas sensor response
The results of microcantilever dynamics investigation, atomic force microscope (AFM) system in realization of the regime of “quartz balance” are given in the article. The dynamics of AFM microcantilever in gas sensor regime is expressed mathematically. Using the devoted elements model, AFM microcantilever resonance modes, their dependence upon the changes of microcantilever structure are determined. Experiments are done with the influence of chemical content of the environment on dynamic characteristics of the microcantilever, covered by sensitive to gas film. Research results are used in creating selective microcantilever gas sensors systems – electronic nose (enose).