Creation and investigation of membrane actuator for nanopositioning using laser micro-machining

Abstract

The article deals with the possibility to apply Si membranes for nanopositioning of microobjects. Applying the finite element method the basic resonant modes and their dependence on different geometry Si plates are identified. The prototype of memicro actuator was designed applying microsystem designing technologies. Using the atomic force microscopy system, static and dynamic characteristics of the membrane structures were defined. The results of the investigation could be applied in developing a new type of nanopositioning systems of scanning microscopy.