Scratching the polymethyl methacrylate and photo resist samples using atomic force microscopy

Abstract

This paper analyses the Atomic Force Microscope (AFM) probe as a well established tool for the characteri-zation of the topography, friction, adhesion forces and sur-face as the modification tool from a micrometer level down to a sub-nanometre level. Micro scale scratches and wear resistance tests using an atomic force microscope have been conducted on polymethyl methacrylate (PMMA) and photo resist coatings. AFM lithography results in the for-mation of extremely small features. The areas, mechani-cally-scratched using AFM cantilever, are better suscepti-ble to modification than the same but unscratched surfaces going to be practice to nano electronic and biological struc-tures.