Nanopositioning – methods and means

Abstract

The article deals with nanopositioning problems. The analysis of applied methods and positioning systems is performed. The most advanced achievements in nanoposi-tioning technologies are presented as well as the samples of their implementation – parallel kinematics, cantilever guides, vibration active decrement algorithms in control systems, elimination of positioning errors, high-speed posi-tioning, i.e. significant elements, without which it is not practically possible to guarantee nanometric precision in positioning systems. The presented samples and formu-lated statements are useful for the designers of nanoposi-tioning means looking for optimal solutions.