Nanopositioning – methods and means

Authors

  • V. Lendraitis
  • V. Mizarienė
  • G. Seniūnas

Abstract

The article deals with nanopositioning problems. The analysis of applied methods and positioning systems is performed. The most advanced achievements in nanoposi-tioning technologies are presented as well as the samples of their implementation – parallel kinematics, cantilever guides, vibration active decrement algorithms in control systems, elimination of positioning errors, high-speed posi-tioning, i.e. significant elements, without which it is not practically possible to guarantee nanometric precision in positioning systems. The presented samples and formu-lated statements are useful for the designers of nanoposi-tioning means looking for optimal solutions.

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Published

2007-04-18

Issue

Vol. 64 No. 2 (2007)

Section

Articles

License

The copyright for the articles in this journal is retained by the author(s) with the first publication right granted to the journal. The journal is licensed under the Creative Commons Attribution License 4.0 (CC BY 4.0).