Modelling and investigation of the silicon membrane actuator for nanopositioning

Abstract

The article deals with the possibility to apply Si membranes for nanopositioning of micro objects.Applying the finite element method the basic resonant modes and their dependence on the different ge-ometry Si plates are identified. The prototype of membrane microactuator was designed applying micro system design-ing technologies. Using the atomic force microscopy sys-tem, the static and dynamic characteristics of membrane structures were defined.Surface views of materials confirm the perspec-tive of using such actuators for nanopositioning.