Numerical analysis of microresonator developed on the basis of PZT nanocomposite

Abstract

Microresonators are fundamental components integrated in hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micromirror devices, material characterization, gyroscopes, etc. Microresonator is a device where a piezoelectric coating plays most important role in the design and operation of the element itself. Also piezoelectric layer allows to create a novel microresonator with controllable parameters, which could assure much higher functionality of microelectromechanical systems. Forming periodical microstructure in the nanocomposite material allows to involve two measurement types for better accuracy: electrical and optical. Finite element model in Comsol Multiphysics environment was created. Numerical analysis of microresonator developed on the basis of PZT nanocomposite is presented. Electrical potential of 2.2 V for the corresponding 10 V input was recorded. Dependency of diffraction efficiency and diffraction angle to period changes were investigated.

DOI: http://dx.doi.org/10.5755/j01.mech.23.5.16308