The Structure Design and Precision Improvement of Small Caliber Non-Spherical Surface Type Detector

Abstract

Aspherical optical elements have significant advantages over traditional spherical elements, and have become the core technology for high-resolution imaging, intelligent devices, and precision instrument upgrades through optical performance, simplifying system structure, and reducing manufacturing costs. It has gradually promoted the development of optical systems towards high performance, lightweight, and high quality. However, the rapid development of aspheric optical elements is limited by the detection technology of aspheric surface profile. In order to solve the problems of detection principle error, low detection efficiency, expensive detection instruments and poor general performance in the current non-spherical optical elements shape detection technology, a new principle of non-spherical surface shape detection is proposed based on the theory of the closest circle, and the detection numerical model of non-spherical is constructed. At the same time, based on this, the overall structure design of small aperture non-spherical surface shape detection instrument is carried out, and the specific steps of detection instrument to implement small aperture non-spherical surface shape detection are analyzed. In order to further improve the detection accuracy of the small-caliber non-spherical surface profile detector, the detection technology of the geometric error of the is studied. The spatial geometric error detection of the moving axis of the small-caliber non-spherical surface profile detector is carried out by using the laser interferometer, and the compensation scheme of the small-caliber non-spherical surface profile detector is proposed through the analysis of the error compensation logic. In addition, the mathematical model of geometric error is established. The correctness of the research content is effectively verified by carrying out the geometric error compensation experiment on the moving axis of the small-caliber non-spherical surface profile, and the research on the accuracy improvement of the small-caliber non-spherical surface profile detector is completed.