Microstructure replication using high frequency vibroactive pad

Authors

  • Rokas Šakalys Department of Mechanical Engineering Faculty of Mechanical Engineering and Design Kaunas University of Technology
  • G. Janušas
  • A. Palevičius
  • R. Bendikienė
  • R. Palevičius

DOI:

https://doi.org/10.5755/j01.mech.21.2.8886

Keywords:

vibroactive pad, hot imprint, diffraction efficiency.

Abstract

The paper is dedicated to analysis and practical exploitation of new generation vibroactive pad, whose fundament is stack type actuator. Experiment is performed in order to find first resonant mode of vibroactive pad, and later on pad is applied in mechanical hot imprint process, pursuing to enhance the quality of created microstructure. Three types of microstructure quality measurements are performed: measurement of diffraction efficiency, optical microscopy and atomic force microscopy, in order to analyze the quality of replica. Microstructures are created on the surface of polycarbonate, using the same process parameters, the only variable is high frequency excitation or its absence.

DOI: http://dx.doi.org/10.5755/j01.mech.21.2.8886

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Published

2015-04-13

Issue

Vol. 21 No. 2 (2015)

Section

DYNAMICS OF MECHANICAL SYSTEMS

License

The copyright for the articles in this journal is retained by the author(s) with the first publication right granted to the journal. The journal is licensed under the Creative Commons Attribution License 4.0 (CC BY 4.0).