Investigation of calibration facilities of precision line scales
The paper describes the development of measurement setup for the characterization and calibration of precision incremental linear encoders. An exposed linear encoder with a phase grating applied to a carrier of glass ceramics Zerodur has been tested and its performance in respect of laser interferometer was compared. It has been proven that the system displays better reproducibility and lower sensitivity to the ambient conditions variations compared with a laser interferometer. Experiments using comparator designs with CCD microscope and slit microscope have been conducted to investigate dynamical capabilities of graduated line scales calibration. The measurement facilities developed allow high precision measurements with velocities up to 25 mm/s and enable us also to more accurate and effective evaluation of metrological properties of the line scales.