Formation of MEMS nanocomposit layers and investigation of their mechanical properties

Abstract

This paper presents formation and investigation of morphology and mechanical properties of nanocomposit layers, widely used in microelectromechanical systems (MEMS). These nanocomposit layers were fabricated on silicon and silica substrates using spin coating procedure from synthesized PVP or Ag/PVP solutions. After spin coating the formed MEMS layer is irradiated with UV light. As later results of investigation using SPECORD UV/VIS spectrometer showed, an irradiation time leads to different absorbance properties of nanocomposit layers. Mechanical properties of both (PVP and Ag/PVP) layers were investigated using a scratch test, i.e. the hardness of each formed layer were evaluated. Elastic properties and morphology were investigated using Atomic Force Micro-scope NT-206.