Hybrid numerical-experimental investigation of two-degree-of-freedom piezoelectric positioning actuator

Abstract

New types of piezoelectric elements, made in the form of hemisphere piezoceramic transducers and aimed at the application in nanoresolution positioning devices on the plane (2 DOFs), are presented. Hemisphere piezoce ramic transducers with specific excitation zones, realized by sectioning electrodes into symmetric parts, enable the generation of several vibration forms with controllable amplitudes and orientation.Hybrid numerical-experimental investigation of hemisphere piezoceramic actuators is presented. It includes combination, comparison and analyzes of experimental and numerical results for the explanation of transducer transla tional motion. Non-contact measurement PRISM system and COMSOL Multiphysics software were applied for the investigation.

http://dx.doi.org/10.5755/j01.mech.17.2.337